University of Essex Nanofab

These pages provide an overview of the semiconductor device research and teaching nanofabrication facilities

References & Acknowledgements
Guide to Etching Techniques

Dr Geoff Hill

(Senior Research Scientist, EPSRC III-V Semiconductor Central Facility, University of Sheffield)

Device Fabrication EPSRC III-V Semiconductor Central Facility


Modern Gallium Arsenide Processing Techniques 2nd ed (Artech House 1990) R.E.Williams
Analysis and Simulation of Semiconductor Devices

Springer-verlag 1984

Siegfried Selberherr
Semiconductors & Electronic Devices (Prentice Hall 1987) Adir Bar-Lev
Introduction to Semiconductors Bart J. Van Zeghbroeck, 1996, 1997
Semiconductor Integrated Circuit Processing Technology

  Addison Wesley 1990

W.R.Runyan, K.E.Bean (Texas Instruments)
VLSI Fabrication Principles: Silicon & Gallium Arsenide

John Wiley 1983

Sorab K. Gandhi
Semiconductor International

Cahners Publishing

The Industry's Source Book for Processing, Assembly & Testing
Solid State Technology

PennWell Publishing

Worldwide Semiconductor Production
Laurin Publishing
European coverage of product developments in optics, imaging, fibre optics, electro-optics and optoelectronics

Laser Focus World

PennWell Publishing

Advances in Optics, Electro-optics, and Optoelctronics

Cleanrooms International

PennWell Publishing

The international magazine of contamination control technology
Growth and Characterisation of Semiconductors

Adam Hilger 1990

ed.R.A.Stradling & P.C.Klipstein


These pages are written & maintained by Adrian Boland-Thoms